INSTRUMENT:

FEI Quanta 650 FEG SEM with integrated custom optical system

AVI-400 Active Vibration Control System

DETAILS:

• Zewail Group operating a Quanta FEG 650 interfaced with a custom optical set-up to enable ultrafast electron microscopy imaging.
• Feeding laser into SEM chamber requires positional stability within a few micrometers, so SEM internal air isolation was not in use.
• Vibration levels present in the environment were significant enough to degrade imaging capability when air isolation was disabled.
• A high performance vibration isolation system which could maintain a high degree of positional stability was required.

FEI Quanta 650 FEG SEM installed on AVI-400 Active Vibration Control System

RECOMMENDATION:

• Table Stable Active Vibration Isolation Technology
• Hybrid of passive and active isolation mechanisms
• Senses incoming vibrations and actively cancels them out
• No low frequency resonance
• Excellent attenuation performance across a broad frequency spectrum and in all six degrees of freedom
• High stiffness
• FEI TESTED AND APPROVED SOLUTION

INSTALLATION:

• Easily retrofitted
• No special tools or training required
• Install takes about an hour
• Does not increase footprint or height of system
• Virtually invisible when installed (see picture above)

AVI modules fit directly under SEM frame

AVI maintains instrument's original footprint and height

No Isolation

AVI Active Isolation