SEM + AVI Series

The Zewail Group operating a Quanta FEG 650 interfaced with a custom optical set-up to enable ultrafast electron microscopy imaging. Feeding laser into SEM chamber requires positional stability within a few micrometers, so SEM internal air isolation was not in use. Vibration levels present in the environment were significant enough to degrade imaging capability when air isolation was disabled. A high performance vibration isolation system which could maintain a high degree of positional stability was required.

“We feel quite positive about the performance of the AVI. The anti-vibration system much reduces the vibration seen in the images, and at the same time maintains vertical stability of the laser interaction with the emitter tip.” – Jerry Yang, Caltech

Caltech Case Study - happy customers


INSTRUMENT

END USER

ISOLATION SYSTEM


RECOMMENDATION

  • Required Tools - Caltech Case StudyTable Stable Active Vibration Isolation Technology
  • Hybrid of passive and active isolation mechanisms
  • Senses incoming vibrations and actively cancels them out
  • No low frequency resonance
  • Excellent attenuation performance across a broad frequency spectrum and in all six degrees of freedom
  • High stiffness
  • FEI TESTED AND APPROVED SOLUTION

 INSTALLATION

  • Easily retrofitted
  • No special tools or training required
  • Install takes about an hour
  • Does not increase footprint or height of system
  • Virtually invisible when installed (see picture above)
    AVI-under-FEI-front-covers-removed-600px
 AVI module installed - caltech case study

QUANTITATIVE RESULTS

Vibration Measurements

Caltech Case Study Results - No Isolation
No Vibration Isolation – 3,523 micro g’s
Caltech Case Study Results - Passive Isolation
With Passive Vibration Isolation – 879 micro g’s
Caltech Case Study Results - Active Isolation
With Active Vibration Isolation (AVI-400) – 308 micro g’s

QUALITATIVE RESULTS

SEM Images of Carbon Nanotubes (Left: Without Vibration Isolation; Right: With Active Vibration Isolation – AVI-400)

Caltech Case Study Results - No Iso SEM Image

Caltech Case Study Results - Active Iso SEM Image

 

 

 

 

 


OTHER BENEFITS:

  • High positional stability enables Ultrafast Electron Microscopy
  • No increase in footprint
  • No change in working height
  • Quick and easy installation
  • No maintenance required