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TS-200M
Active Vibration Isolation
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- Isolates in all six degrees of freedom
- Lack of low-frequency resonance means much better performance than passive systems
- Active isolation range: 1 - 1000 Hz Passive isolation beyond 1000 Hz
- Low profile is ideal for retrofit and height sensitive applications
- Inherent stiffness of system imparts excellent directional and positional stability
- Turn-key installation
- Active isolation can be switched on and off via remote control
Applications include SEM/TEM, SPM, AFM, UHV applications, wafer production, interferometers, process, and metrology.
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| Load Capacity: |
600 - 1600 kg ( 1300 - 3500 lbs),
200 kg (440lb) per module |
| Isolation: |
Active 1 - 1000 Hz |
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Passive > 1000 HZ |
| Correction Forces: |
± 8 N in any direction |
| Static Compliance: |
Vertical approx 12 µm / N (per module) |
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Horizontal approx 30 - 40 µm/ N (per module) |
| Auto-Leveling: |
± 5 µm with isolation off |
| Dimensions & Weight: |
21 x 21 x 12.5 cm, 5.5 kg (per module)
8.3 x 8.3 x 5 in, 12 lbs (per module) |
| Controller Dimensions: |
Standard: 24 x 13 x 25 cm (9.4 x 5.1 x 9.8")
Rack Mount: 48 x 13 x 25 cm (19 x 5.1 x 9.8") |
| Power Consumption: |
10 W typical; 50 W maximum (4 modules) |
| Input Voltage: |
115-230 VAC; 50-60Hz |
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address:
23151 Alcalde Drive, Ste B-3
Laguna Hills, CA 92653 |
tel/fax:
949-363-2905 ,
949-340-9751 |
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Copyright © 1996-2008 HERZAN LLC All Rights Reserved. |
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