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Turner Group, University of Wisconsin – Madison,

MEMS Application


Product: Herzan TS-150 Desktop Active Vibration Isolation System

End User: Turner Research Group , College of Engineering, University of Wisconsin-Madison

Location: Second Floor Laboratory, Engineering Centers Building, University of Wisconsin - Madison, USA

Instrument: Custom-built AFM probe system measured with an interferometer

Details: The Turner Group is using interferometry to measure the deflection on an AFM probe. The instrument is being used to investigate adhesion and surface properties of nanoscale materials for MEMS applications. Despite being placed on an air-based isolation table, the instrument's measurements were being affected by environmental vibrations. Noise sources included a laminar flow hood, nearby construction, and the lab's location on the second floor of the building. An evaluation with a Herzan TS-150 desktop active vibration isolation system was arranged in the lab. The TS-150 effectively eliminated the troublesome vibrations and has allowed the researchers to continue their nanoscale measurements.

Video 1: This video depicts the AFM probe being suspended in air. The movement of the fringes represents environmental noise reaching the probe. This is a baseline video taken with no isolation.

Video 2: This video is taken using the air-based optical table. The movement of the fringes represents the amount of environmental noise reaching the probe while using passive isolation.

Video 3: This video is taken using the Herzan TS-150 desktop active vibration isolation table. The movement of the fringes represents the amount of environmental noise reaching the probe while using active isolation.

Special Thanks: John Nguyen, formerly of the Turner Group, currently with Sandia National Laboratory; Professor Kevin Turner, Department of Mechanical Engineering, University of Wisconsin-Madison

 

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