SEM + AVI Series

The Zewail Group operating a Quanta FEG 650 interfaced with a custom optical set-up to enable ultrafast electron microscopy imaging. Feeding laser into SEM chamber requires positional stability within a few micrometers, so SEM internal air isolation was not in use.

Vibration levels present in the environment were significant enough to degrade imaging capability when air isolation was disabled. A high performance vibration isolation system which could maintain a high degree of positional stability was required.

“We feel quite positive about the performance of the AVI. The anti-vibration system much reduces the vibration seen in the images, and at the same time maintains vertical stability of the laser interaction with the emitter tip.” – Jerry Yang, Caltech

Application Details

Instrument: FEI Quanta 650 FEG SEM with integrated custom optical system
End User: Zewail Group, California Institute of Technology
Active Vibration Control Platform: AVI-400 Active Vibration Control System

Recommendation

AVI-400 Platform

AVI-400M: Table Stable Active Vibration Isolation Technology
Hybrid of passive and active isolation mechanisms
Dynamically senses incoming vibrations and actively cancels them out
No low frequency resonance
Excellent attenuation performance across a broad frequency spectrum in all six degrees of freedom
High stiffness and rigidity (500x more stiff than passive solutions)
FEI TESTED AND APPROVED SOLUTION