MEMS + TS Series
The Turner Group is using interferometry to measure the deflection on an AFM probe. The instrument is being used to investigate adhesion and surface properties of nanoscale materials for MEMS applications. Despite being placed on an air-based isolation table, the instrument’s measurements were being affected by environmental vibrations. Noise sources included a laminar flow hood, nearby construction, and the lab’s location on the second floor of the building.An evaluation with a TS-150 active vibration isolation table was arranged in the lab. The TS-150 effectively eliminated the troublesome vibrations and has allowed the researchers to continue their nanoscale measurements.
- Microelectromechanical Systems (MEMS)
- Custom-built AFM probe system measured with an interferometer
RESULTS – COMPARISON VIDEOS
The below videos depict the AFM probe being suspended in air. The movement of the fringes represents environmental noise reaching the probe. Videos were taken of the probe movement when installed with no isolation, air isolation, and active vibration control for comparison.