Active Vibration Control, AFM Noise, Soundproof Hood, Vibration Measurement Equipment

Electron Microscopy Application
INSTRUMENT:
 
FEI Quanta 650 FEG SEM with integrated custom optical system
 
 
 
END USER:
 
 
ISOLATION SYSTEM:
 
 
 
DETAILS:
 
  • Zewail Group operating a Quanta FEG 650 interfaced with a custom optical set-up to enable ultrafast electron microscopy imaging.
  • Feeding laser into SEM chamber requires positional stability within a few micrometers, so SEM internal air isolation was not in use.
  • Vibration levels present in the environment were significant enough to degrade imaging capability when air isolation was disabled.
  • A high performance vibration isolation system which could maintain a high degree of positional stability was required.
FEI Quanta 650 FEG SEM installed on AVI-400 Active Vibration Control SystemFEI Quanta 650 FEG SEM installed on AVI-400 Active Vibration Control System
  
 
 
 
 
RECOMMENDATION:
 
 
  • Hybrid of passive and active isolation mechanisms
  • Senses incoming vibrations and actively cancels them out
  • No low frequency resonance
  • Excellent attenuation performance across a broad frequency spectrum and in all six degrees of freedom
  • High stiffness
  • FEI TESTED AND APPROVED SOLUTION

 
INSTALLATION:
 
  • Easily retrofitted
  • No special tools or training required
  • Install takes about an hour
  • Does not increase footprint or height of system
  • Virtually invisible when installed (see picture above)
Tools Required for Install
 
Tools Required For Installation
  
AVI modules fit directly under SEM frameAVI modules fit directly under SEM frame AVI maintains instrument's original footprint and heightAVI maintains instrument's original footprint and height  
 
 

 

QUANTITATIVE RESULTS - VIBRATION MEASUREMENTS

Click to Enlarge

  
No Isolation – 3,523 micro g’sNo Isolation – 3,523 micro g’s Passive Isolation – 879 micro g’sPassive Isolation – 879 micro g’s

AVI Active Isolation – 308 micro g’sAVI Active Isolation – 308 micro g’s

 

QUALITATIVE RESULTS - SEM IMAGES OF CARBON NANOTUBES

Click to Enlarge

  
No IsolationNo Isolation AVI Active IsolationAVI Active Isolation
 

 

 

RESULTS - OTHER BENEFITS:


  • High positional stability enables Ultrafast Electron Microscopy
  • No increase in footprint
  • No change in working height
  • Quick and easy installation
  • No maintenance required
 
 
CUSTOMER FEEDBACK:
 
“We feel quite positive about the performance of the AVI. The anti-vibration system much reduces the vibration seen in the images, and at the same time maintains vertical stability of the laser interaction with the emitter tip.” - Jerry Yang, Caltech
 
Happy Customers! Omar Mohammed, Jerry Yang, and Xin Li - Zewail Group Researchers taking a rare breakHappy Customers! Omar Mohammed, Jerry Yang, and Xin Li - Zewail Group Researchers taking a rare break
 
 
ACKNOWLEDGEMENTS:
 
Special thanks to the research group of Prof. Zewail at the California Institute of Technology, notably Xin Li, Omar Mohammed, and Jerry Yang.
 
Special photographic consideration provided by Fred Houston, Ventura Precision.
 
 



Active Vibration Control | Vibration Isolation Systems | Acoustic Enclosure | Soundproof Hood | AFM Noise | Vibration Measurement Equipment