NEW – SC28 Monitoring System
Herzan is excited to announce the latest release from Spicer Consulting: the SC28 monitoring system. The SC28 enables long-term, uninterrupted monitoring of magnetic fields, vibrations, and acoustic noise – as well as temperature and humidity – within the lab and semiconductor fab. This system is intentionally-designed to monitor the environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Electron Beam Lithography tools, and SEM-based metrology and inspection tools
What’s In the Box
The SC28 utilizes high-performance sensors and monitoring hardware to deliver a clear and comprehensive understanding of the environment being measured.
- Monitoring System: SC28/SI
- AC/DC Sensors: Sensor SC24/DC+AC and Sensor SC11/AC
- Acoustic Microphone: Brüel & Kjær 4190 microphone
- Vibration Sensors: Wilcoxon 731A accelerometers (three)
- Temperature/Humidity Sensor: Sensor SC28/TH
Unique Monitoring Features
- Purposefully Designed: Long term environmental monitoring for electron beam instruments
- Complete Environmental Monitoring: continuously measure magnetic fields, floor vibration (X, Y, and Z), acoustic levels at 2kHz, and temperature/humidity at 1Hz or below
- Completely Visual: up to 14 different graphs may be displayed simultaneously
- Comprehensive Acquisition: Acquires sensor data and logs spectra and charts to date-stamped files
- Self Sufficient: can run without user interface open
